Used TEL / TOKYO ELECTRON Unity IIe 855DD #293646444 for sale
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TEL / TOKYO ELECTRON Unity IIe 855DD is an etcher/asher specifically designed for photovoltaics (PV) applications. This unit is a cost-effective and versatile solution for the manufacture of large area devices. TEL UNITY IIE 855 DD is composed of a gas panel and a turbo pump unit. The gas panel delivers a precise and predictable nitrogen atmosphere, while the turbo pump unit enables smooth and efficient transfers, thus ensuring uniform reaction across the etching process. Together, the gas panel and turbo pump unit are capable of achieving high accuracy to ensure tight process control. TOKYO ELECTRON UNITY II E-855DD is also equipped with a state-of-the-art sensor system that ensures accurate and consistent processing every time. It is designed to monitor pressure, temperature, flow and distribution of key chemicals, allowing users to gain real-time data and analysis on the process. This feedback helps to provide the best possible etching results, aiding in the production of high-quality and defect-free PV cells. TOKYO ELECTRON Unity IIe 855DD features a quartz metal hot wall CVD for protective coating before etching. Its process speeds are up to 300 mm/min, and its etching depth is between 500 and 1000 nm. Its chamber size is 600 x 600 mm and its power is 2 kW. The unit further includes a motorized lift and inclinometer pan with a scanning range of 100 x 100 mm. Additionally, UNITY II E- 855DD is designed with process flexibility in mind and can be quickly reconfigured to different process recipes with minimal effort. This ensures users can benefit from rapid turnaround times and obtain maximum efficiency in their production. TEL Unity IIe 855DD etcher/asher is an excellent solution for PV device manufacturing that provides precision, process control, and data feedback. It is also extremely flexible and is designed to produce large area and high-quality etching with minimum effort.
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