Used TEL / TOKYO ELECTRON Unity IIe 855DD #293759382 for sale

TEL / TOKYO ELECTRON Unity IIe 855DD is an advanced etch / asher equipment designed for handling multiple substrates and processes. Featuring a full 7-inch platen, the system is capable of accommodating wafers up to eight-inch in diameter, providing cost-effective process flexibility for a wide range of applications. Additionally, the programmable platen configuration permits quick, easy setup for all process needs. The robust, reliable design of TEL UNITY IIE 855 DD includes a stainless steel interior chamber, advanced process control modules, temperature proportioning, AMAT Model 855DD type RF source, direct current source, deep etch capability, PECVD high power source, and additional handling and etch process tools. The unit is also equipped with a 20-slot open frame style cassette loader with optional barcode reader and a manual parallel loading option; and a multi-gas delivery unit featuring gas flow monitors, pressure regulation and control, and mass flow controllers. The machine features a high accuracy, advanced process control tool which allows users to precisely set and maintain pressure, temperature, and bias control setpoints. TOKYO ELECTRON UNITY II E-855DD also provides exhaust control, NFC clean opening and closing, as well as a precautionary "abort" button to safeguard against accidental process starts or equipment damage. In addition, the asset comes with built-in programmable protection to ensure the safety of process personnel and the equipment. TOKYO ELECTRON UNITY II E- 855DD offers up to two monitors, allowing users to track temperature, pressure, and other process monitoring parameters during processing. The model features a built-in recipe storage equipment which allows users to store and recall up to 128 unique recipes at one time. This system also includes a 10-setting pressure controller for optimizing the etch process for both single-wafer and batch processing. TEL / TOKYO ELECTRON UNITY II E-855DD is able to capture a variety of data including but not limited to etch chamber time, pressure, and temperature setpoints, as well as other real-time data from wafer image capture, thin film measurements, and photoresists. This data can be gathered and reported for analysis. The unit also offers an integrated Health Monitoring Machine (HMS) for continuous monitoring and cooling tool maintenance. In summary, TOKYO ELECTRON Unity IIe 855DD is an etch / asher asset offering a wide range of intermediate and advanced process capabilities. Boasting a robust stainless steel chamber, comprehensive filtration, advanced bus monitoring, and additional safety elements, the model is highly efficient and reliable while also providing cost efficiency.