Used TEL / TOKYO ELECTRON Unity IIe 855DD #293764218 for sale

TEL / TOKYO ELECTRON Unity IIe 855DD is a state-of-the-art etching technology designed for precise, larger substrate processes. Built on the latest etching platform, TEL UNITY IIE 855 DD is suitable for a variety of process applications, from MEMS devices to OLED displays. The 855DD utilizes a unique multi-chamber design separatng different gases and wafers to produce higher quality results. Advanced port enhancements allow for higher levels of process control and easier maintenance. TOKYO ELECTRON UNITY II E-855DD features an integrated Global Positioning Sensor for precision placement across an entire wafer area. This accuracy is transferred to the wafer with a precise drive mechanism, providing users with the highest degree of accuracy and uniformity. The etcher is also designed to reduce downtime, featuring a unique bottom-up process to reduce the risk of contamination when changing wafers. It is also built with Auto-Detect functions, allowing for preventive maintenance to run faster and without user interaction. The core hardware of the 855DD consists of a 1,200mm x 800mm table and a rotating chamber. The table is constructed from a highly durable material to reduce downtime and ensure precise results. It is fitted with TEL proprietary Processing heads and Energy Distribution System (EDS) to provide advanced process control and uniform transport of ions along the wafer's surface. The rotating chamber is designed with Autostar architecture and equipped with Electron Energy Distribution nozzle tips to enable the best possible uniformity and long-term reliability. Beyond the hardware, TOKYO ELECTRON UNITY IIE 855 DD runs on soft TOKYO ELECTRON software to further improve the etching process. The UVAS software takes into account the ion energy distribution and patterns it to produce consistent results, while the CIRO software ensures accurate recipe settings and usage data. The 855DD also features advanced safety protocols, such as ESD protection and Emergency Power Shutoff, for added security. In conclusion, TOKYO ELECTRON Unity IIe 855DD is an advanced etching technology with an integrated multi-chamber design, global positioning sensor, and a variety of software and hardware solutions to ensure precise, large substrate results with the highest levels of accuracy and uniformity.