Used TEL / TOKYO ELECTRON Unity IIe 855DD #9109095 for sale
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ID: 9109095
Wafer Size: 8"
Vintage: 1997
Oxide etcher, 8"
(2) Chambers
1997 vintage.
TEL / TOKYO ELECTRON Unity IIe 855DD is a dual-lane etcher/asher that is ideal for industrial or university-level production. It offers a high level of integration with standard tools such as steppers, robots, and vacuum chambers. The equipment is designed to support a variety of substrates, including silicon wafers, glass, metals, and organic materials. It is also compatible with several leading photolithographic techniques. TEL UNITY IIE 855 DD is a high-performance tool featuring integrated process control for superior throughput and repeatable results. It is equipped with automatic wafer exchange, which allows for multiple substrates to be processed in different stages conveniently and safely. The 855DD also features advanced process control with real-time feedback on process parameters. It can automatically detect anomalies and react appropriately, allowing for a consistent etch profile with minimal operator interaction. For process control, the 855DD has an integrated gas exhaust system that is equipped with proprietary sensor technology to ensure reliable etch rates and chemical termination. It also has a motor controller to precisely manage process motion and stage movement speed. The 855DD also has an integrated traceability and data storage unit for accurate process control. It is capable of reading etched data and bar codes with an integrated laser scanner for improved quality control and data storage. The 855DD can also store and monitor equipment states, traceability data and operating history as well as machine fault information. TOKYO ELECTRON UNITY II E-855DD uses a PC-based user interface which provides full process control, monitoring, data storage, as well as a range of reporting options. The intuitive operation and graphical user interface makes it easy to set up and use. In addition to its high level of integration and control, UNITY II E-855DD is designed for reliability, safety, and soft landing. The tool is fully compliant with international safety standards and is equipped with a mechanical shutter for safe wafer handling and protective materials for process fumes containment. Unity IIe 855DD is an easy to use dual-lane etcher/asher, suitable for industrial or university-level production. It offers enhanced control and integration with standard tools for efficient process control and data storage. The intuitive, user-friendly interface and reliable gas exhaust tool make it an ideal choice for industrial environments. With its efficient and safe operation, TEL / TOKYO ELECTRON UNITY II E- 855DD is the perfect choice for any production environment.
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