Used TEL / TOKYO ELECTRON Unity IIe 855DD #9219373 for sale
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TEL / TOKYO ELECTRON Unity IIe 855DD is an advanced wet etcher and asher tool designed for processing semiconductor wafers and other substrates. This tool is capable of performing etching, ash, and a variety of other related processes. The 855DD is outfitted with a fully automated, integrated system for controlling the process environment, optimizing the etching conditions, and monitoring the wafer uniformity. The 855DD is a versatile tool capable of performing a variety of processes, such as deep reactive ion etch (DRIE), chemical wet etch, hydrofluoric acid (HF) etch, RIE/etch/ash, wet ash, and ion milling. The 855DD incorporates edge technology, such as field-emission scanning electron microscopy (FESEM), to monitor and control the process chamber environment and wafer uniformity. Additionally, the 855DD etcher materials are capable of being heated up to 400°C to facilitate the etching process. The 855DD also has four automatic process pre-sets that allows for easy setup and ease of use. The 855DD is specifically designed to implement etch and ashing processes in an integrated system. This integration ensures the best possible results from the entire etching and ashing process. The 855DD incorporates a broad range of process options that enable tight control over multiple process parameters to achieve desired results. It is equipped with an automatic bridge which monitors and controls the uniformity of the oxidation and etching process. The 855DD is a versatile tool that can be used in a variety of semiconductor processes. It is remarkably efficient due to its integrated process control environment, high-tech features, and automation capabilities. This etcher and asher tool provides reliable results that will help to maximize efficiency and reduce manufacturing cycles. The 855DD is capable of performing both wet and dry etching, and ash operations by configuring different wafer etching and ashing processes to meet the specialized needs of various applications.
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