Used TEL / TOKYO ELECTRON Unity IIe 855DD #9246928 for sale

TEL / TOKYO ELECTRON Unity IIe 855DD is an etcher/asher designed for a variety of applications in semiconductor device fabrication. It is a vertical-loading etcher/asher capable of producing high quality etch patterns and asher etch profiles. Its advanced design is built to provide maximum throughput and uniform process conditions to ensure the highest levels of device reliability. TEL UNITY IIE 855 DD utilizes a Pulsed ReverseTransformer (PRT) to achieve maximum resonant etching performance. It is equipped with TLD32 Process Control Software (PCS) that ensures accurate and repeatable process cycles for optimal etch profiles and asher results. TOKYO ELECTRON UNITY II E-855DD also incorporates a Vacuum Gate (VG) that enables the chamber pressure to be precisely maintained during etch and ashing operations. Unity IIe 855DD is built with many advanced features to ensure repeatable and reliable processing. These include a high-importance chamber with a gas distribution system, an advanced closed-loop thermoelectric cooling loop, and two-dimensional end-point detection. The chamber is also surrounded by a stainless steel bellows system to reduce any pressure variations. The chamber pressure is also monitored in a rotary mass flow meter. TOKYO ELECTRON UNITY II E- 855DD is capable of handling substrates up to 783mm x 858mm in size. It is designed to provide a consistent process window and throughput for maximum efficiency, with etch patterns ranging from 40µm to 600µm in depth. The etcher/asher also comes equipped with a large wafer loading system, thereby supporting multiple recipes, optimized for each application. UNITY II E-855DD is designed to meet the highest standards of reliability and repeatability in device fabrication. It operates at a maximum temperature of 850°C and at a process pressure of up to 10 mTorr. The etcher/asher comes with both RS-232 and IEEE-488.2 interfaces for remote operation and data tracking. The etcher/asher can also be upgraded with the latest control and diagnostics systems. TEL / TOKYO ELECTRON UNITY II E- 855DD is an advanced and reliable etcher/asher solution for advanced semiconductor device fabrication. It is designed to provide high throughput and consistency for the best results. Its advanced features and systems enable it to meet the strict requirements of semiconductor manufacturing. This etcher/asher is capable of producing high quality material patterns and process profiles while maintaining its superior reliability and repeatability.