Used TEL / TOKYO ELECTRON Unity IIe 855DD #9303715 for sale

TEL / TOKYO ELECTRON Unity IIe 855DD
ID: 9303715
Oxide etcher.
TEL / TOKYO ELECTRON Unity IIe 855DD is a high-end etch/ash equipment for fabricating a variety of devices or substrates. It offers superior performance with its advanced control system and intuitive user interface. The unit has six independent process chambers, including a wafer carrier for up to eight (8) 300mm wafers or four (4) 600mm wafers. It utilizes high-precision linear motor drives for fast and accurate motion control, enabling faster processing times and high productivity. TEL UNITY IIE 855 DD is designed to simplify maintenance and improve serviceability. The unloaded process chambers can be completely removed for cleaning and maintenance, streamlining the process and significantly reducing downtime. The machine also has a built-in default routine that minimizes time spent on wafer preparation, saving more time for processing. In order to ensure quality, TOKYO ELECTRON UNITY II E-855DD has numerous features. The tool is compliant with industry standards such as GEMs, SEMI 6.3, and SEMI 14. Its unique advanced control asset uses real-time data gathering and feedback to control and optimize etch and ash parameters. Additionally, all process steps are monitored and controlled for semi-conductor process improvements. To facilitate easy operation, UNITY II E- 855DD includes a user-friendly graphical interface. This allows the user to customize settings and quickly recall process recipes for repeat functions. On-screen help and troubleshooting advice is also available. Furthermore, onboard diagnostic systems allow for easy issue identification and quick resolution. In conclusion, TEL / TOKYO ELECTRON UNITY II E- 855DD is an effective etch/ash model for semi-conductor fabrication and R&D efforts. Its advanced control and performance capabilities assure superior processing results, while its user-friendly interface and on-board diagnostic systems help minimize time spent on setup and maintenance.
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