Used TEL / TOKYO ELECTRON Unity IIe 855II #9071931 for sale
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ID: 9071931
Wafer Size: 8"
Vintage: 1999
Oxide etcher, 8"
(2) Chambers
Wafer type: flat-zone
Rack type: V1 rack
Processing type: vacuum
Wafer loading type: normal
MFC:
GAS #1 C4F8 50
GAS #2 Ar 1000
GAS #3 SF6 100
GAS #4 CHF3 100
GAS #5 O2 20
GAS #6 CF4 200
GAS #7 PN2 100
GAS #8 CO 200
APC: VAT 61146-PH02-ABM1
Gauges:
Baratron CELERITY CDLD0112E 0~1TORR
Baratron TYRAN GENERAL CDL0112E 0~1TORR
Baratron MKS 622A01TDE 1PA
Convectron G/PHILLIPS 275203
TMP MITSUBISHI E-0776
TMP Controller MITSUBISHI FT-1200W
Robot YASKAWA VS2E
Robot Controller YASKAWA SRC-Ⅱ013
Generator PERAL LT-2000-800K; PERAL RP-3000-27M
6.Matcher PERAL M-30AW2VD-27M; PERAL M-20A2LS-V2
1999 vintage.
TEL / TOKYO ELECTRON Unity IIe 855II is an etching/ashing machine used in a wide variety of industries. It is a powerful, energy efficient tool designed to etch/ash a variety of substrates quickly and precisely. It features a robust design and advanced process technologies for etching/ashing processes. TEL UNITYIIE-855 II is capable of processing two-dimensional (2D) and three-dimensional (3D) structures in silicon (Si), indium phosphide (InP), gallium arsenide (GaAs), electrical substrates, and other precious materials. It is designed to create a uniform surface texture, and provide a high etching/ashing rate while maintaining end product the highest quality. TOKYO ELECTRON UNITY IIE 855 II boasts a wide range of process parameters, including pressure, time, temperature, and substrate thickness. It features a four-zones plasma source, flexible software control, and a quick start-up time. The easy to use and precise control offered by the machine allows for the reliable and repeatable etching/ashing of the substrates. TEL UNITY IIE 855 II is designed for maximum efficiency and integrates with a wide variety of tools and systems. The machine is capable of handling multiple wafers, and can be used with a number of specialty tools to support various etching/ashing process requirements. It is also compatible with other TEL/TOKYO equipment, such as wafer handlers, top-mount furnaces, and FOUP loaders, to create a complete and efficient system. TEL / TOKYO ELECTRON UNITY IIE 855 II is an industry leading etching/ashing machine designed to provide high quality results with a wide range of parameters and equipment. With its robust and varied capabilities, it is an ideal choice for the processing of a variety of materials with high precision, precision, and repeatability.
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