Used TEL / TOKYO ELECTRON Unity IIe 855II #9142648 for sale

TEL / TOKYO ELECTRON Unity IIe 855II is a highly advanced plasma etcher/asher designed specifically to meet the high-end requirements of the semiconductor industry. It offers superior process stability, low maintenance, fast and accurate processing, and overall increased yields. It is equipped with a high-resolution 12 inch color touch-screen, automated job scheduling and file management capabilities, as well as Advanced Diagnostics management equipment for real-time process monitoring. TEL UNITYIIE-855 II is equipped with four interconnected plasma chambers, allowing for up to four different types of substrate materials (such as silicon wafers) to be etched or ashed simultaneously, for increased efficiency. It can accommodate substrates up to 300 mm in diameter and up to 25 mm in thickness. An automated substrate transfer system is also included for simplified job setup and quicker substrate loading and unloading. The plasma chamber is equipped with a high-frequency RF (radio frequency) power supply, as well as internal magnets for optimum plasma control and uniformity. The chamber is also powered by a dual-frequency generator, allowing for both DC and RF to be applied, depending on the etching/ashing requirements. An additional dual-frequency generator can be mounted externally to the chamber for further customizability. TOKYO ELECTRON UNITY IIE 855 II enhancement unit (ES) is included as standard for enhanced etching/ashing performance. The ES allows for direct gas injection, which significantly increases the etching/ashing speed of the process, as well as superior cleaning and pattering capabilities. Several secondary custom tools can also be connected to the ES for further customization. TEL / TOKYO ELECTRON UNITY IIE 855I I is also equipped with a number of safety and environmental features, including gases monitoring to prevent gas overloading, and a secondary refrigeration machine to ensure a stable and consistent process temperature. In addition, the instrument has low noise emission making it ideal for laboratory and fabrication environments. Overall, TOKYO ELECTRON UNITY IIE-855II is a highly advanced and reliable etcher/asher designed to meet the requirements of the modern semiconductor industry. It offers superior process stability, automated job scheduling and file management, dual-frequency generators, gas injection capabilities, and numerous safety features for increased efficiency and yields.