Used TEL / TOKYO ELECTRON Unity IIe 855PP #293764219 for sale
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TEL / TOKYO ELECTRON Unity IIe 855PP is a high-end etcher / asher designed to provide users with reliable and repeatable etching performance. This etcher / asher features a wafer loading equipment for up to 8-inch x 6-inch wafers and is equipped with an advanced End Point Detection (EPD) system. This unit is specifically designed to provide ultra-precise etching results with a high degree of repeatability. TEL Unity IIe 855PP also features an advanced heating machine that is designed to provide a low-temperature operation at temperatures as low as 50°C. This heating tool also offers various temperature control options such as manual temperature adjustment, preset program temperature control, and automatic temperature cycle control. The etcher / asher is also equipped with an internal motor that can be adjusted to provide variable motion, as well as automatic wafer handling at wafer loading and unloading. In addition, TOKYO ELECTRON UNITY IIE 855 PP also provides users with advanced multi-modal technology, which includes plasma etching, wet etching, and dry etching capabilities. This etcher / asher also features a cyclic etching process that can be used for multiplexing process. In addition to the features described above, TOKYO ELECTRON Unity IIe 855PP also includes an atmospheric control asset which enables the etcher / asher to keep the atmosphere within the chamber clean, safe, and free from impurities. This model also features a pressure adjustable capacity and can achieve a pressure range of 0-50 torr in order to operate in both atmosphere and vacuum processes. UNITY IIE 855 PP also offers a variety of additional features designed to provide users with improved performance. These features include integrated wafer support and automated wafer alignment which provides users with higher throughput rates, improved process uniformity, and increased repeatability. Additionally, the etcher / asher also includes anti-reflective coating which helps reduces substrate reflections, increases etch uniformity, and enhances equipment performance. TEL UNITY IIE 855 PP is designed to provide users with advanced etching and ashing capabilities. This etcher / asher is suitable for use in research and development and production applications. The features of this equipment, such as its advanced heating system, multi-modal technology, atmospheric control unit, advanced wafer loading and alignment, and anti-reflective coating capabilities can significantly enhance the user's etching and ashing performance.
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