Used TEL / TOKYO ELECTRON Unity IIe 855SP #197627 for sale

TEL / TOKYO ELECTRON Unity IIe 855SP is a state-of-the-art etcher/asher equipment designed for precision processing. It is a highly reliable and adaptable system capable of accurately creating openings, passages, and holes in a wide range of substrates with precision. The process itself is guided by comprehensive software that optimizes etching and ashing parameters for higher throughput and improved quality. TEL Unity IIe 855SP utilizes a powerful electron beam platform with features such as fast and accurate patterning of highly conductive layers, wafer curvature/taper correction, and the ability to etch on irregular or uneven substrates. It has a 2.3nm diameter beam size, a stitching resolution of 0.48µm, and a uniformity of ±2%, making it suitable for high-resolution photoresists and substrates with fine structures. Electron beam patterning speed is up to 375mm2/hr (depending on process parameters). To ensure accuracy and uniformity, TOKYO ELECTRON Unity IIe 855SP includes a dedicated scanning optics package and a powerful computer unit with a data acquisition/processing suite for automatic process optimization. Scanning optics provide precise pattern control and ensure repeatable layer profile through the use of up to four electron implanters. The machine also has an advanced control software package which allows precise control of each process step from the raw material to the final device. It also allows the user to control the ion species, voltage, current, and energy for each step. Unity IIe 855SP's process recipe management makes it easy to store, recall, and modify patterns for rapid process automation. It is capable of supporting mixed and monolithic processes such as photolithography, plasma etching, and electron beam evaporation. Its straightforward recipe setup and monitoring interface allow for structured process development with ease. Overall, TEL / TOKYO ELECTRON Unity IIe 855SP is a reliable and efficient etcher/asher tool designed for precision processing. It is highly efficient in creating openings, passages, and holes in a wide range of substrates and supports flexible process automation for increased accuracy and throughput.