Used TEL / TOKYO ELECTRON Unity IIe 855SS #9033646 for sale

ID: 9033646
Wafer Size: 8"
Vintage: 2004
Oxide etcher, 8" Flat-zone wafer type (2) Chambers Mass flow controller GAS #1 C5F8 20 GAS #2 C4F8 20 GAS #3 CF4 100 GAS #4 CHF3 50 GAS #5 CH2F2 50 GAS #6 AR 1,000 GAS #7 O2 50 GAS #8 P-N2 500 Pressure controller ISO V/V (PC1) VAT 65048-JH52 ISO V/V (PC2) VAT 65048-JH52 Gauge Baratron MKS 627B-15405 Baratron MKS 627B-15405 Robot YASKAWA VS2C Robot controller YASKAWA SRC-Ⅱ016 TMP (PC1) EDWARDS STP-A2203W1 TMP Controller (PC1) EDWARDS STP-A2203W1 TMP (PC2) EDWARDS STP-A2203W1 TMP Controller (PC2) EDWARDS STP-A2203W1 Generator (PC1) DAIHEN WGA-30C Generator (PC2) DAIHEN WGA-30C Matcher (PC1) DAIHEN AMN-30C11 Matcher Controller (PC1) Matcher (PC2) DAIHEN AMN-30C11 Matcher Controller (PC2) EPD (PC1) EPD (PC2) T/C TMP Controller AC RACK (PCB BOARD): SVA031 Not included: TEB107 TEB162 GST-M-SET TVB0008 TC(PCB BOARD) COM DIO1 DIO2 DIO3: Not included MAIO ILK PC1 (PCB BOARD): APC DIO MAIO EPD COM TEMP PC2 (PCB BOARD): APC: Not included DIO MAIO EPD COM TEMP 2004 vintage.
TEL / TOKYO ELECTRON Unity IIe 855SS is a next-generation single wafer plasma etching tool that provides superior performance and improved process capability. It features an advanced plasma source that optimizes process uniformity and delivers precise gas control with no erosion of components. TEL UNITYIIE-855 SS has a patented low-temperature-diffusion plasma source that delivers excellent performance with maximum throughput, and excellent precision control of the reactive species. TOKYO ELECTRON UNITY IIE-855SS features a high-precision wafer stage capable of reaching temperatures as low as -60°C. This stage provides an enhanced deposition process that is ideal for creating surfaces with desired properties. The wafer stage is driven by a state-of-the-art motor and stepper coil equipment that ensures an accurate and uniform distribution of energy. The PC-controlled production system also includes a sophisticated diagnostics unit that provides real-time monitoring of the etching process and can alert the user if an issue arises. TEL / TOKYO ELECTRON UNITY IIE-855SS is also equipped with a fully integrated machine that eliminates mechanical transfere of particles and contaminants between wafers and the vacuum chamber. This comprehensive tool ensures the highest levels of cleanness and process repeatability. Additionally, TEL / TOKYO ELECTRON UNITY II E 855SS supports the use of a wide range of chambers configurations, including chemical vapor deposition (CVD) and reactive ion etching (RIE) chambers for etching processes. TEL UNITY IIE 855 SS also has an energy-efficient design and is capable of running at faster speeds while consuming less power than other etching tools. Its advanced control software allows for unattended operation and automated recipes that facilitate loading and unloading wafers, as well as an integrated online tracking asset that provides information on production data, calibration history, and performance. Overall, TEL UNITY IIE-855SS is a high-performance etching tool that provides superior process capabilities and improved cost savings. Its advanced technology, energy-efficient design, and comprehensive control model make it a reliable and efficient option for etching applications.
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