Used TEL / TOKYO ELECTRON Unity IIe 855SS #9177764 for sale

TEL / TOKYO ELECTRON Unity IIe 855SS is an etcher/asher that is designed to create high precision patterning on various types of materials. It has a high-vacuum etching/stripping capabilities with multi-wafer processing. This etcher/asher has a control software suite that automates the entire process of etching/ashing, with optimized precision. The design of the chamber also ensures high visibility of the wafer surfaces to the operator, while preventing any particle contamination. TEL UNITYIIE-855 SS can process up to 8 inch wafers, with a process chamber volume of 400 liters. It features a dual-frequency RF generator and has automated parameter adjustment. The chamber also utilizes a low-energy plasma source for maximum precision in patterning. The temperature of the vacuum chamber can be regulated from 5 to 250 degrees Celsius for a variety of materials, including silicon and organic substrates. It also supports multiple process gases including Ar, O2,CF4, and CHF3. TOKYO ELECTRON UNITY IIE-855SS is designed to achieve extremely high throughput speed, cutting the etching/ashing cycle time by half. It has a CCD camera for process monitoring, along with a gamma-ray sensor for precise measurement of particle removing efficiency. It also has an end-point detection system and auto-wafer transfer feature for easy automated operation. Users can monitor the condition of the etcher/asher remotely through Ethernet connectivity. This device also has a built-in cleanliness verification system which monitors the process environment to ensure no particle contamination. It also has both an online and offline recipe system to save and recall etching/ashing settings at any time. UNITY IIE-855SS is a powerful etcher/asher designed for precision patterning of various materials. It offers highly accurate results with extremely fast processing speeds, making it an ideal equipment for industrial and research applications.