Used TEL / TOKYO ELECTRON Unity IIe 855SS #9236831 for sale

TEL / TOKYO ELECTRON Unity IIe 855SS
ID: 9236831
Wafer Size: 8"
Etchers, 8" (2) Chambers.
TEL / TOKYO ELECTRON Unity IIe 855SS is a sophisticated etcher / asher designed to simplify and improve the precision and accuracy of substrate cleaning processes. The equipment is designed to efficiently and quickly remove contaminants from substrates through the use of high-pressure, volatile chemistries in a high-temperature environment. The system includes a user-friendly touchscreen interface and a flexible motion unit to allow for the precise etch or ash desired. TEL UNITYIIE-855 SS is designed to operate using temperatures up to 1000°C and power up to 300 watts. The unit has a 506 x 506 mm processing chamber surrounded by a 16-sided gate and a patented reflection liner. This helps to keep the uniformity of the process environment across the substrate and minimize the risk of hotspots or uneven heating affecting the etching process. A cooled media delivery tube is used to provide a precise and consistent media stream on the substrates during the process. The machine also contains a variety of safety features, such as interlocked access panels, an automatic safety shutdown, and an emergency stop button. The tool also includes a power monitor, which measures power draw to ensure that the unit is not overloaded. Additionally, TOKYO ELECTRON UNITY IIE-855SS contains a built-in auto diagnostic feature, which allows users to check the asset performance any time during the process. This helps ensure that the model is running at its peak performance. TOKYO ELECTRON UNITY II E 855SS enables advanced process control through the use of profile tuning, substrate tracking, pressure and temperature adjustment, and live chamber imaging. Additionally, the equipment can be used in combination with other tools to support more complex substrate processing. This includes the ability to run a multi-stage etch or ash process with increased precision and complexity. Overall, TOKYO ELECTRON Unity IIe 855SS provides an accurate, reliable, and efficient substrate processing system that can be tailored to meet the needs of each individual application. The unit is designed to be easy to use and maintain, with advanced safety features and monitoring capabilities, all of which ensure that the etching or ashing process is carried out in a safe and precisely controlled manner. UNITY IIE-855SS is an ideal choice for a range of etching and ashing applications, from small to large batches of substrates.
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