Used TEL / TOKYO ELECTRON Unity IIe 855SS #9292571 for sale

TEL / TOKYO ELECTRON Unity IIe 855SS
ID: 9292571
Wafer Size: 8"
Dry etcher, 8".
TEL / TOKYO ELECTRON Unity IIe 855SS Etcher/Asher is a versatile hardware solution for etching and ashing photomasks, reticles, and other patterned surfaces. The system uses a multi-stage process to precisely control temperatures, gas flow, and power levels across a wide range of processes. TEL UNITYIIE-855 SS features a hydrolytic etching chamber, a vacuum stage, a hydrogen peroxide bath, and a blowdry chamber, all used to achieve a cleaner, more uniform etch or ashing of the desired target material. TOKYO ELECTRON UNITY IIE-855SS is designed to allow for rapid and precise etching and ashing of photomasks and reticles within a single unit. Through intelligent process control, it is able to limit the wafer thermal budget and temperature drift. In addition, the system is equipped with high-sensitivity temperature sensors that make sure uniform etching and ashing conditions are maintained across all points on the patterned surface. This results in greater accuracy and higher yields. The hydrolytic etching chamber of UNITY IIE 855 SS is equipped with an advanced VCA (Voltage Controlled Activation) process that provides consistent and repeatable results across a wide range of etching and ashing applications. This includes etching, coating, and removing thin layers, such as those used in processing photomasks and reticles. The chamber also includes a robust load-lock system for efficient loading and unloading of substrates, increasing through-put and reliability. TOKYO ELECTRON Unity IIe 855SS comes equipped with a hydrogen peroxide bath which is used to amplify, enhance, and extend the etching and ashing processes. This peroxide bath is also capable of removing contaminants, providing additional levels of precision to the process. The bath is temperature-controlled to maintain uniform etching and ashing conditions across all parts of the surface being etched or ashed. Finally, TEL / TOKYO ELECTRON UNITY II E 855SS includes a blowdry chamber that evacuates and dries the etch or ashing material, resulting in a cleaner and more uniform etched or ashed result. The blowdry chamber is equipped with variable-speed fans, providing improved drying efficiency and accuracy. This efficient drying procedure minimizes the risk of potentially costly errors and maximizing product yield. TEL / TOKYO ELECTRON UNITY IIE-855SS is the ideal etcher and asher for photomasks, reticles, and other patterned surfaces. Its versatility, reliability, and precision make it an essential solution for electronics fabrication facilities, increasing both productivity and product quality.
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