Used TEL / TOKYO ELECTRON Unity IIe 85DD #293760242 for sale

TEL / TOKYO ELECTRON Unity IIe 85DD is an etcher/asher, which uses plasma and chemical processes to produce small-scale devices, such as chips and circuits. This device is composed of a main chamber with a width of 370mm, a depth of 50mm, and a height of 500mm, and several inner containers for holding the materials to be etched, such as silicon wafers, gallium arsenide and sapphire. The device is interfaced to a computer via RS-232 communication and structured in several working modes to provide full automation of the etching process. TEL Unity IIe 85DD features an advanced etcher head design with a nozzle having four angularly orientated jets and four concentrically cylindrical jets. The jets enable an even delivery of the plasma or chemicals to the workpiece, allowing for smooth etching output. The process of etching begins with the combination of gases in the chamber and the supplying of energy, generated by a 60MHz microwave generator. This energy creates a uniform distribution of plasma over the entire workpiece, which results in a conduction current, causing the work material to decompose. Additionally, various chemicals can be used in combination with the plasma etching process to enhance its accuracy. The most unique feature of TOKYO ELECTRON UNITY IIE 85 DD is its fully automated process control capabilities. It uses a closed-loop control equipment to precisely adjust the working parameters, such as the temperature, pressure, exposure time, and the rate of plasma delivery. This ensures an accurate etching result and minimizes the possibility of material damage due to incorrect etching conditions. In addition, the presence of oxygen and moisture sensors within the system enables the automatic adjustment of etching conditions for variation in the material used. Finally, UNITY IIE 85 DD offers a wide range of safety features. The interior of the chamber is built with a stainless-steel vacuum enclosure to protect against thermal damage and prevent accidents due to sudden pressure changes within the unit. The device is also equipped with a machine vision machine and multiple sensor-based systems to continuously monitor the process and ensure stability. Furthermore, an emergency shutdown tool allows the user to quickly abort the etching process in case of unexpected events.