Used TEL / TOKYO ELECTRON Unity IIe 85DD #9219713 for sale
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ID: 9219713
Wafer Size: 8"
Vintage: 1996
Oxide etcher, 8"
(2) Turbo pumps
(2) RF Generators
(4) EBARA Pumps
Remote AC box
(2) Process chambers
CIM Linked
1996 vintage.
TEL / TOKYO ELECTRON Unity IIe 85DD is a multi-chamber etcher designed to process a wide variety of semiconductor wafers. This device is engineered with a proprietary 85DD chamber process, which provides quick and accurate etching results. The equipment is comprised of two process chambers, which work together to complete the etching process. The first chamber is capable of performing standard etch processes, such as wet and dry etch, while the second chamber is dedicated to pre-cleaning and post-etching processes. This two-chamber system allows for efficient and accurate etching of different materials without needing manual changes to the set-up. TEL Unity IIe 85DD is equipped with a multi-gas delivery unit and a patented electro-pneumatic gas switching machine. This tool allows the user to control the etching process by precisely controlling the flow of reactive gases and inert gases. The unit is also equipped with PEPE, or Plasma Etching of Polymers and Energetics, which is specifically designed to process polymers and other sensitive materials. The PEPE asset is a dual-head laser arrangement that uses ultra-short pulses of laser energy to create small features in sensitive materials. TOKYO ELECTRON UNITY IIE 85 DD is built to uphold the highest industry standards of safety and environmental protection. The unit's containment dome prevents airborne particles generated during processing from escaping outside the chamber; additionally, the chamber is equipped with an oxygen monitoring model that automatically adjusts the pressure and flow of gases to ensure a safe operation. Other safety features include automatic shutter operation, an integrated fire extinguishing equipment, and a ground fault interrupter switch. TOKYO ELECTRON Unity IIe 85DD's intuitive interface provides the user with easy and fast access to the system's settings. In addition to the unit's integrated process software, users may also control the unit remotely via smartphone or other wireless devices. UNITY IIE 85 DD is an optimized and versatile etcher suited for the advanced etching needs of semiconductor manufacturers. Its advanced features, integrated safety systems, and intuitive user-interface make the unit an ideal choice for any semiconductor etching applications.
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