Used TEL / TOKYO ELECTRON Unity IIe 85I EM #9091879 for sale

TEL / TOKYO ELECTRON Unity IIe 85I EM etcher/asher machine is a dry etch and ashing equipment designed for plasma etching and dry ashing in the semiconductor fabrication process. The system is designed with a multi-station, multi-process capability, allowing multiple processes to be integrated into one. It features a sealed chamber unit with auto-cleaning and drying capabilities, reducing breakage of materials with controlled and repeatable process results. TEL UNITY IIE 85IEM features a high-tech dual-frequency generator with a low-frequency radio frequency section, and a high-frequency source to maintain uniform chamber pressure during the plasma etching and ashing process. The machine is designed with an active-susceptor element to locate and promote the etching in a selected region. The active-susceptor element also helps to reduce chemical erosion or etch back of the resist mask. TOKYO ELECTRON UNITY II E 85IEM etcher/asher is equipped with an internal gas composition monitoring tool, providing accurate plasma gas composition control with the ability to analyze and monitor gas concentrations on an ongoing basis. It also comes with robust clamshell-style doors for mechanized load and unload. The etcher/asher allows for flexible mode switching between etching and ashing with rapid and easily programmable recipe programming. All target material parameters can be adjusted precisely with gas flow control and uniform substrate temperature. The asset also provides accurate repeatable temperature profiles for every recipe loading, enabling simple setup and fast job correction. An integrated, advanced plasma etch monitoring model with comprehensive data logging provides real-time recipe execution tracking. TEL UNITY II E 85IEM is designed with a fully automated safety equipment, providing high safety standards to protect operators, materials and the environment. It also comes with an intuitive HMIS software with recipe logging, and multi-language support options, allowing for easy operation by users with different abilities and language backgrounds. TEL Unity IIe 85I EM etcher/asher is an effective system for use in the semiconductor fabrication process, providing reliable process control for maximum yield and repeatable results.