Used TEL / TOKYO ELECTRON Unity IIe #293642910 for sale

TEL / TOKYO ELECTRON Unity IIe is a precision etcher and asher designed for the most exacting applications. This industrial class machine features a 12" diameter FOUP substrate holder with a 6" substrate size capability, an integrated electron beam device, an 18" X-ray detector and an optional laser scriber. It also features an integrated turntable with adjustable speed and a computer-controlled process. TEL Unity IIe is one of the most advanced etchers and ashers available in the market today. It has the capability of handling a wide range of substrates, from quartz, gallium arsenide and germanium wafers for compound semiconductor production, to low-k dielectrics for advanced packaging, and from thin film photomasks to thin films for microelectronic work. The command set of TOKYO ELECTRON Unity IIe is impressive and allows for extremely precise control over etching and ashing processes. Dedicated etching and ashing functions allow for independent control of the respective processes and enable complex and sophisticated treatments. Additionally, Unity IIe is equipped with a centralized control panel for equipment operation and parameters setting. TEL / TOKYO ELECTRON Unity IIe also offers flexibility in terms of substrate supply and processing. It features a combination of Front Open Un-load/Load (FOUP) and manual loading systems, allowing users to switch between manually loaded and automated substrates. Additionally, there's a comprehensive library of processing recipes which can be stored in the system's memory and used in the automated substrate switching process. As a further feature of TEL Unity IIe, there's an integrated X-ray detector with 18" array of sensors, allowing users to monitor progress during etching and ashing processes. Additionally, the unit is equipped with temperature sensors to ensure the sample temperature remains constant during the processing cycle, thereby minimizing the possibility of defects or damage to the substrate. TOKYO ELECTRON Unity IIe is a highly advanced process control machine and provides users with an etching and ashing tool that can meet their most demanding needs. Its combination of sophisticated components and an intuitive operator interface makes it the ideal tool for a variety of research and production operations.