Used TEL / TOKYO ELECTRON Unity IIe #9093721 for sale

TEL / TOKYO ELECTRON Unity IIe etcher/asher is a reliable, cost-effective, and highly efficient etching and ashing process that is ideal for device-level processing, yield management, and product innovation. TEL Unity IIe is one of TEL advanced plasma etchers and ashers which are designed to deliver extremely precise processing. The process chamber is rated for class 10,000 cleanliness and equipped with advanced process control features such as automatic gas switching and auto-balanced power distribution to ensure superior etching and ashing performance. TOKYO ELECTRON Unity IIe uses a low-pressure plasma etching process that is ideal for creating high-aspect ratio features. It employs a PECVD overcoat that creates an exact conformal coating for enhanced etching and ashing precision. For improved process economics, Unity IIe is capable of processing large wafers in single runs. It uses an 8x300mm wafer size and is temperature programmable for superior substrate adhesion. TEL / TOKYO ELECTRON Unity IIe also comes with multi-station wafer cassette loading, auto-purge fail-safe protection, and intuitive automated wafer loading technology to ensure excellent wafer handling and throughput. TEL Unity IIe also has configurable process gas lines that can be used for etching, ashing, or a combination of both processes. It has five independent gas delivery systems that enable optimized etching profiles for optimal etch results. In addition, TOKYO ELECTRON Unity IIe is equipped with customizable process recipes, adjustable parameters, and advanced online feedback control for superior etching precision. Unity IIe is designed for use in various industries, such as semiconductor, consumer electronics, MEMS, and LED fabrication. With its powerful etching and ashing capabilities, TEL / TOKYO ELECTRON Unity IIe can rapidly process 260-300 wafers per hour while achieving superior uniformity. It is capable of fully controlling process parameters to ensure repeatable and consistent results for increased product reliability and yield.