Used TEL / TOKYO ELECTRON Unity M 85 TD #9254149 for sale
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ID: 9254149
Wafer Size: 8"
Oxide etcher, 8"
Components:
Load Lock Module (LLM)
Transfer chamber
Pre aligner
(2) Process chambers
(3) Gate valves
(2) Bottom RF matchers
(2) Upper electrode cooling fans
(2) ESCs
(2) Baffle plates
(2) Shield rings
(2) Upper electrodes
(2) Pedestals
(2) Quartz insulators
Turbo molecular pump
Focus ring
Ceramic insulator
Quartz pipe
Display
Light tower
Pumps:
(2) Process chamber dry pumps
(2) Dry pumps racks
EBARA Load lock dry pump
EBARA Transfer chamber dry pump
(2) PC TMP Pumps missing
Main controllers:
(4) Hard Drive Disks (HDD)
(2) Control boards, AI/AO boards set
Big system control box
TC Controller box
Chillers:
SMC Dual chiller
SMC Single chiller
(4) Chiller hoses
Cables:
(5) Pump power cables
(4) Pump control cables
(6) Power cables
(3) Chiller control cables
(5) Remote pump cables
Interface cable
Gas box cable
AC Cable
(2) Gas boxes
(2) V-37 Valves
AC Power box: AC Distribution box
Foreline connecting pips.
TEL / TOKYO ELECTRON Unity M 85 TD is an etcher / asher designed to provide reliable and economical production of microelectronic components. This tool is a multi-chamber process equipment able to process multiple components in a single run. It is designed to perform wet or dry processes, and includes the ability to apply high temperature and/or selective etching. The system is programmed using a control panel or front panel interface, and has several safety features that can be programmed for automated operation. TEL Unity M 85 TD features a multi-chamber design with a main chamber and two sub-chambers. It is equipped with a unique gas arrangement unit which allows the operator to accurately deliver the correct amounts of gas and the appropriate types for each processed process. The machine also features advanced diagnostics tools, which allow the operator to quickly troubleshoot any malfunctioning equipment. It also comes standard with an automated process control tool (APCS) which continuously monitors the process parameter readings to ensure that the exact specifications are maintained. This etcher / asher has a multi-range power level of up to 25 W, allowing a high variety of precision operations. It has a rapid heating capability which enables shorter processing times, and the integrated thermal control asset helps to ensure consistent operation and repeatable results. TOKYO ELECTRON Unity M 85 TD is designed to work with various specialty gases to ensure a wide range of applications. Unity M 85 TD has a number of standard safety features that protect the operator, the model, and the process. All airborne particles are removed by an built-in exhaust equipment, and ESD (electrostatic discharge) resistant material is used to prevent potential injury or damage. The system also features an integrated air filter, which continuously monitors the air quality and adjusts the process accordingly. TEL / TOKYO ELECTRON Unity M 85 TD is a reliable and efficient addition to any production line. It is designed to maximize throughput and reduce costs, while also ensuring the highest quality finished product. Its advanced safety features ensure accident prevention and a continuous production process. This etcher / asher is ideal for precision applications, such as semiconductor devices, displays, and thin-film technology.
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