Used TEL / TOKYO ELECTRON Unity M #293820990 for sale
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TEL / TOKYO ELECTRON Unity M series etchers/ashers are high-performance systems for etching and stripping photoresist patterns from wafers. TEL Unity M features a broad range of processes to meet a variety of needs and boasts excellent process repeatability and uniformity. In addition, TOKYO ELECTRON UNITY-M consumes less power and uses less material than other systems. TEL / TOKYO ELECTRON UNITY-M is a comprehensive etcher/asher equipment designed to support a variety of processes such as copper etching and dielectric stripping. It is equipped with a high-precision interlock system and a sophisticated function control unit that records and manages all process related data. This machine can etch and strip photoresist or other materials with a varying etching rate and the parameters can be set and adjusted in real-time. A robotic sample changer can also be connected to Unity M for automated control and quick sample loading. The advanced process tools of TOKYO ELECTRON Unity M allow for improved wafer uniformity with low distortion and uniform pattern and foil formation. It also reduces the time required to equip a repeatable recipe using its auto-calibration function. TEL UNITY-M also boasts advanced safety functions for hazardous material and short-circuit control. UNITY-M has a control module which can setup multiple recipes of etch parameters in one click. Its intuitive user interface also supports remote control and data sharing with TEL performance monitoring tool. This provides detailed and accurate process control to ensure improved yield and performance. In addition, TEL / TOKYO ELECTRON Unity M consumes less power and material than other systems, with an average power consumption of 500W. It is also efficient in terms of personnel costs and is capable of executing both simple and complex etching processes. TEL Unity M can greatly improve the efficiency of etching and stripping processes and lower production costs. It also offers various features to improve process performance and reduce cycle time. Thus, it is a versatile and powerful nucleic acid surface etcher/asher that can achieve excellent etching results at lower costs.
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