Used TEL / TOKYO ELECTRON Unity ME 45D #293615959 for sale

TEL / TOKYO ELECTRON Unity ME 45D is an etcher/asher designed for use in semiconductor fabrication. This single-chamber dry-process etcher/asher is suitable for both mass production lines and research and development applications. TEL Unity ME 45D can etch a wide variety of materials, including silicon, oxide, nitride, poly-silicon, and metals, with a low ratio of loss or uptake during etching. The ME 45D is designed with a single chamber, with two sets of shower heads and two sets of substrate holders. This allows two substrates to be etched at the same time. It also features a high vacuum system with a three-stage turbomolecular pump for greater etching precision. The etcher/asher is equipped with a number of process control units that enable the etcher/asher to maintain the precise conditions necessary for the etching process. The ME 45D is controlled by a vertically mounted control panel, which allows the operator to adjust the etch time, etch pressure and other parameters for precise etching results. The ME 45D is also equipped with gas mixing and in-situ diagnostics systems to monitor the process and to ensure the accuracy of the etch process. The gas mixing system is able to precisely control the flow rates and ratios of the gases used during etching. The ME 45D is also designed with safety features, including an inert gas leak detector, emergency ventilation, and a leak detection system. In addition, the ME 45D has a high-efficiency scrubber unit to capture any particulates and odors generated during etch process. The ME 45D is a dry-process etcher/asher that offers a wide range of etching capabilities, precise control, easy maintenance, and user safety features. This combination ensures that it is an ideal etcher/asher for semiconductor fabrication.