Used TEL / TOKYO ELECTRON Unity ME 85 DRM #293610374 for sale

TEL Unity ME 85 is an etch/ash equipment designed to effectively process wafers with a variety of substrates. It is one of the most advanced and reliable etch/ash systems on the market, featuring a wafer size capacity of up to 10 inches. The system is equipped with a multi-chamber and multi-zone metal-oxide-semiconductor (MOS) etcher/ashers, allowing for a level of control that is unattainable with other types of systems. The unit also features an advanced diffusion and deposition chamber, which enables precise control over the etch/ash process and allows for quick, uniform processing of the wafers. Additionally, TOKYO ELECTRON Unity ME 85 is outfitted with an automatic wafer loader, allowing for quick and efficient loading and unloading of the machine. TEL / TOKYO ELECTRON Unity ME 85 utilizes an advanced plasma impedance control (PIC) tool, delivering a more precise control over the plasma resulting in uniform etch/ash processing. Furthermore, the asset has an enhanced cooling model to minimize wafer temperature variation, allowing for precise and repeatable processes. This etch/ash equipment also offers configurable recipes with PC GUI to quickly customize processes for particular requirements and features a multichannel thermal limit system to ensure precise temperature control and consistency. In addition to precise control and accuracy in the etch/ash process, TEL Unity ME 85 also features a high throughput rate, enabling it to process up to five wafers per minute. This makes the unit ideal for high-volume etch/ash applications, as it shortens cycle times for maximum throughput and productivity. Overall, TOKYO ELECTRON Unity ME 85 is an advanced etch/ash machine that combines precise control, uniform processing, and high throughput, making it an attractive tool for any semiconductor applications, especially those that require quick, uniform etch/ash processing.