Used TEL / TOKYO ELECTRON Unity ME 85 #9286040 for sale

TEL / TOKYO ELECTRON Unity ME 85 is an advanced etcher / asher equipment designed for etching and ashing processes. The system is an Evolution Unit-type Eller/Wet Etcher (EUE). The EUE is a double-sided etching and ashing chamber which provides uniformity by means of independent etch/ash control and seamless transition between the two. The etching process utilizes both an oxide removal function and an anti-etch function, both of which can be accurately and precisely adjusted for optimal processing results. The unit is compatible with both standard and high-aspect ratio wafers and can support 75mm-125mm for ashing applications. It is also pre-set with options for plasma- or UV-based etching, as well as for a range of etch/ash chamber to wafer size ratios. In addition to its etching and ashing functionalities, TEL Unity ME 85 offers a range of other features that make it an ideal choice for many applications. It has convenient load lock and RF as well as the ability to control temperature, DC bias, auto-correct, and machine-wide diagnostics and alarms. It is also certified for 12 kinds of different gases for etching, as well as for various combinations of oxidants and non-oxidants. It can monitor up to four gases simultaneously and is equipped with adjustable ports for sensors and detectors, to help maintain the process running smoothly and efficiently. The tool is also backed by an international service network so that service and maintenance for its components can be done quickly and conveniently. To ensure the highest level of safety and performance, TOKYO ELECTRON UNITY ME-85 is also certified to UL/CSA, CE, and VDE standards. Overall, TEL / TOKYO ELECTRON UNITY ME-85 is a reliable and efficient etcher/asher asset that provides the high level of accuracy required for a variety of processes. Its sophisticated features, comprehensive safety and performance standards, and convenient service and maintenance protocols make it a great choice for any etching and ashing application.