Used TEL / TOKYO ELECTRON Unity ME 8555 DDD #9117097 for sale
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ID: 9117097
Wafer Size: 8"
Vintage: 2002
System, 8"
Process type: Oxide
Wafer type: Notch
(3) Chambers
Chamber type: DRM
Main body type: SMIF
Interface type: SMIF
Robot fork type: Ceramic coating
Wafer clamp type: ESC
ESC Type: Ceramic
No EPD
ECC Rack: V-2
Monitor: Front
Signal tower: (4) Colors
Automation online: GEM
Area sensor type: Individual (2) area sensors
Includes:
Vacuum / RF Controller module
AC Power distribution: TEL (UM 4PC)
No Y2O3 Process kit
Transfer chamber:
C/C1 Convactron GRANVILLE PHILLIPS 275071-KF16
C/C1 Pressure switch LEYBOLD vakuum PS113 16014
C/C2 Convactron GRANVILLE PHILLIPS 275071-KF16
C/C2 Pressure switch LEYBOLD vakuum PS113 16014
T/C Convactron GRANVILLE PHILLIPS 275071-KF16
Transfer robot YASKAWA XU-RVM3800
Wafer alignment YASKAWA XU-AVP3700
C/C1 Controller YASKAWA XU-BDB14011
C/C2 Controller YASKAWA XU-BDB14012
Transfer interface box YASKAWA XU-BCB1600
Gate valve type VAT ROLLCAM
Process chambers (1,2,3):
Gas# 1 C4F8 10 sccm
Gas# 2 Ar 100 sccm
Gas# 3 O2 10 sccm
Gas# 4 CHF3 100 sccm
Gas# 5 N2 500 sccm
Gas# 6 CF4 100 sccm
Gas# 7 CH2F2 100 sccm
Gas# 8 C4F6 30 sccm
CM1 250 mTorr MKS 627A-13614-S
CM2 10 Torr MKS 627A-14583
PCV Unit center 100 Torr MKS 640A-22936
PCV Unit edge 100 Torr MKS 649A-22016
APC V/V VAT 65044-PH52-0004
APC Con't VAT PB6 (in P/C Control Rack)
Turbo pump SEIKO SEIKI STP-A803C
Turbo con't SEIKO SEIKI STP-A803C
Pressure switch#1 MKS 51A52TGA2BA500
Pressure switch#2 MKS 51A31TGA2BA010
Convactron GRANVILLE PHILLIPS 275071-KF16
Ion gauge LEYBOLD 1TR100-T
RF Generator (Bottom): ENI GHW-25
RF Matcher (Bottom): ENI MWD-25LD
DC P/S: TEL
HV-DC P/S: TEL
Lift pin type: TEL Stepping motor drive
GAP Type: Pancake air cylinder
Process chamber 2:
Gas# 1 C4F8 10 sccm
Gas# 2 Ar 100 sccm
Gas# 3 O2 10 sccm
Gas# 4 CHF3 100 sccm
Gas# 5 N2 500 sccm
Gas# 6 CF4 100 sccm
Gas# 7 CH2F2 100 sccm
Gas# 8 C4F6 30 sccm
Electrical configuration:
ECC:
Slot#0 TEB408-11 HDMC
Slot#1 SVA011
Slot#2 SVA011
Slot#3 TEB107_ECS5
Slot#4 PPC6603ev_M/C TEB205
Slot#5 PPC6603ev_M/C TEB205
Slot#6 Blank
Slot#7 TEB001-12_GHUB
Slot#8 Print board
Slot#9 Blank
Slot#10 Blank
Slot#11 Blank
Slot#12 TVB0008-2_VMIF
ECC P/S ECC DC Power supply module
HDD#1 TEB407 HDD Base
HDD#2 TEB407 HDD Base
Transfer chamber:
Slot#1 Blank
Slot#2 TYB135 / OPE
Slot#4 TYB134 / ILK
Slot#5 TYB112 / DIO#1
Slot#3 TYB112 / DIO#2
Slot#6 TYB112 / DIO#3
Slot#7 TYB111 / MAIO
Slot#8 YE CPU (JASRC-BCP02) Software Ver 2.2
Slot#9 YE CPU (JASRC-BCP02) Software Ver 2.2
Slot#10 Blank
Slot#12 YE P/A ( XU-SVA0100C)
T/C P/S T/C DC Power supply
Process chambers (1,2,3):
Slot#1 APC / PB-6
Slot#2 Blank
Slot#3 TYB112 / DIO
Slot#4 TYB111 / MAIO
Slot#5 Blank
Slot#6 TYB121 / COM#1
Slot#7 TEMP / REX-B860-CS2
Does not include:
Pumps
Chillers
SMIF Loaders: LPT2200
2002 vintage.
TEL / TOKYO ELECTRON Unity ME 8555 DDD, also known as an etcher or asher, is a specialized tool used for a wide variety of tasks by professionals in the electronics industry. It is designed to precisely deposit a variety of materials onto the surface of a substrate. Its capabilities make it a valuable tool for various processes including etching, deposition, lithography, and assembly. The device consists of a stainless steel chamber, a turntable for substrate positioning and transport, a mass flow controller, a gas manifold, and a heating system. As for the technical specifications, the Unity ME 8555 boasts of a working area with a substrate holder of 400x400mm. Also, it has a capability of etching substrates up to a thickness of 0.5mm. With this setup, the user can etch substrates of various materials such as copper, silicon, aluminum and stainless steel. The device is extremely easy to use due to its robust graphical user interface. It can easily be programmed to yield desired results as per material requirements. The device is integrated with a built-in auto-recipe feature that allows the user to store an unlimited number of etching recipes. Furthermore, it has a built-in camera that allows video monitoring of the etching progress, hence aiding the user in managing the process. Moving on, the etcher also has a software that allows the user to view the data after the etching process. This integrated etching analysis software includes a variety of tools such as etch rate, line width measurement, focus level, and surface roughness. All this data helps the user to create etching profiles and modify the process as per the desired results. TEL Unity ME 8555 DDD is an incredibly reliable and durable machine. It's designed for easy maintenance and replacement of parts without any intervention. With multiple capacities of etching material types, the etcher is suitable for a range of processes and applications. Its extensive features and capabilities make it an ideal choice for many applications, from consumer electronics to automotive development.
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