Used TEL / TOKYO ELECTRON Unity SP #9284470 for sale

TEL / TOKYO ELECTRON Unity SP is a state of the art, fully automated etcher / asher designed to produce high quality etch results with minimal time and effort. The versatile equipment is composed of the main etcher unit and one steel pre-etch chamber. The main etcher unit features an independent hot zone with adjustable temperature and an open frame process chamber to facilitate quick wafer exchange. The pre-etch chamber is equipped with a high flow pump, capable to reach high etching speeds and large throughputs. TEL Unity SP has both manual and automated operation modes, providing complete control of the etch processes. A control system, including touchscreen interface and PC, ensures high accuracy of all etching parameters. Vacuum is supplied by a high-efficiency turbomolecular pump, allowing for a clean and fast etching environment. Advanced safety features, such as exhaust and protective temperature alarms, are also present in TOKYO ELECTRON Unity SP. Whether you require dry or wet etching, the systems is highly efficient, uniformity, and repeatability of results. Unity SP is capable of etching the most complex substrates, from nanometer grooves to entire substrates, without the need for any additional equipment. Moreover, its advanced climate control unit enables low temperature etching for sensitive materials and substrates with high precision. In addition, TEL / TOKYO ELECTRON Unity SP provides advanced vertical and re-circulation pumps for efficient, uniform etching with minimal edge formation. The pumps ensure even distribution of etch chemicals and low chemical waste, providing high level of etching results. An outer chamber sequentially supplies etching gases to the process chamber and evacuates the process chamber during etching. Overall, TEL Unity SP etcher / asher is the most advanced machine designed to provide the most accurate etching results available on the market. Its feature-rich design allows for easy, fast, and efficient operation while providing consistent, clean, and high performance etching results.