Used TEL / TOKYO ELECTRON Unity Ver.II 65DI #293643508 for sale

TEL Unity Ver.II 65DI is a highly advanced etcher/asher designed for the optimal etching and ashing of wafers used in semiconductor fabrication. It is capable of handling a wide range of wafer sizes, making it a versatile and effective solution for etching and ashing tasks. The max substrate size of TOKYO ELECTRON Unity Ver.II 65DI is 6 inches (150mm). It supports substrate temperatures up to 1,150°C and includes an air bearing stage that enables uniform, repeatable etching and ashing of the wafers. There is a real-time optical video monitoring equipment that allows observation of the etching and ashing process, ensuring quality assurance. The monitor system coupled with the auto-load unit makes it easier to repeat, perform, and monitor processes with precision. The etching/ashing process is managed by a pair of auto-positioners and EGA gate. The EGA gate is capable of controlling the flux, pressure and depth of etching, allowing for more precise results. Additionally, an optional ion source can be added to the unit, allowing for faster etching and ashing of the substrates. The Unity Ver.II 65DI etcher/asher is designed for high throughput and efficiency. It supports an economy time etching process, reducing process time by increasing the etching and ashing speed. Additionally, a wide range of gases, including hydrogen bromide (HBr) and chlorine (Cl2), can be used to produce a highly controllable and consistent etch profile. The unit can be extended with a variety of options, making it suitable for both R&D and production applications. TEL / TOKYO ELECTRON Unity Ver.69DI etcher/asher is an efficient, fast, and precise solution for etching and ashing of wafers and substrates. Its versatile nature and automatic control machine make it a great choice for any etching and ashing process.