Used TEL / TOKYO ELECTRON UNITY Vera85 DPATC #9145468 for sale
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ID: 9145468
Wafer Size: 8"
Vintage: 1997
Oxide etcher, 8"
(2) Chambers
1997 vintage.
TEL / TOKYO ELECTRON UNITY Vera85 DPATC is an etcher/asher that is used for process control and patterning of semiconductor devices. It comes equipped with integrated plasma source technology which provides excellent compatibility with all reactive gases, enabling a wider range of functions and greater accuracy in process applications. The device has a compact and relatively lightweight design, with a small footprint that can fit in most lab environments. Its high-resolution LCD allows for precise patterning and process control. The Vera85 DPATC features automatic recipe-based etching and high-speed, high-resolution lithography capabilities. This enables faster production cycles with more precise patterns, letting users process larger area plates. It also has a built-in imaging system to provide microscopic feedback on the Plate Quality, making it easier to produce precision patterns with fewer defects. Its integrated process tools include a plasma generator control module (PGD), power supply management, and analytical Sensors for process monitoring. This etcher/asher is designed especially for Direct Patterning Transfer (DPT) applications such as MEMS, opto-electronics, and HBML applications. Its advanced plasma-based technology is suitable for any non-volatile materials, including Single-Wafer and Open-Frame etching. Its integrated, high-density diagnostics capabilities also enable process optimization. Its automated system design helps reduce the chances of broken processing, while its advanced data processing programs provide detailed reports of processing qualities. The Vera85 DPATC also features a 64-bit processor capable of performing different process control tasks. It can be programmed to perform process scenarios such as stabilization, contamination prevention, and optimization. Its LED touch panel can be adjusted so that each random access bit has different power levels for optimized performance. This allows users to make precise control of the etching process. TEL UNITY Vera85 DPATC is an ideal edge etcher and asher for all DPT applications. Its automated systems and advanced technologies make it an efficient and precise machine for quality processing. Its user-friendly design and features make it a great choice for both experienced and novice users.
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