Used TEL / TOKYO ELECTRON Unity #293665143 for sale

TEL / TOKYO ELECTRON Unity is an etcher/asher with high throughput designed to meet the needs of both advanced lithographic production and low volume prototyping applications. The etcher/asher has a modular design that allows the user to choose from a wide range of components to configure the etcher for specific process needs. The etcher/asher features a large chamber and high throughput which allows users to process large substrates quickly. The machine has a rotating tilting susceptor which gives both uniformity and uniform etching depths on various substrates. The etcher/asher also includes close-loop sensors to provide precise process monitoring and repeatable results. TEL Unity is compatible with multiple gases and etch recipes, making it possible to etch different materials from a single machine. The etcher/asher has a clean design which reduces chemical contamination; its stainless-steel chamber and pumped exhaust system make it easy to use and clean. TOKYO ELECTRON Unity also has highly automated features, including automated gas flow control and automated recipe selection. The etcher/asher is designed to be both user-friendly and reliable, with intuitive controls and automatic safety shut-off in case of a problem. Unity is easily expandable, with additional accessories such as high speed copper coating, sublimation, plasma activation, and other special process tools. With its advanced features, TEL / TOKYO ELECTRON Unity provides the user with unmatched flexibility and ease of use.