Used TEL / TOKYO ELECTRON Unity #9146219 for sale

TEL / TOKYO ELECTRON Unity is a critical etching equipment used in the semiconductor process. It is equipped with a single wafer dry plasma asher that can perform advanced material etching and deposition projects. The system features a revolutionary new upgraded design that stresses better performance, reliability, and productivity. The etching unit integrates multiple processes into one modular machine, achieving an efficient and automatic chemistry exchange process. TEL Unity is based on a vacuum chamber whose inside is made of a clean, inert material. An evacuated atmosphere is established in the chamber by a turbomolecular pump connected at the rear. Inside, a movable electrode holder holds the samples in place. A PMAC (Power Monitor and Control) allows for precise voltage, current and frequency modulation control throughout the etching process. The process is controlled through a touchscreen user interface with an on-board process library featuring over 15 process recipes. The tool is compliant with SEMI standards, and the interface is compatible with customer's automation systems. An ECO Mode of operation helps to ensure optimum processing time and cost. TOKYO ELECTRON Unity has a variety of features that make the asset reliable and efficient. Auto-conditioning technology eliminates manual planning by controlling conditioning based on user-defined parameters. In addition, the quartz polysilicon wafer etch mode achieves high anisotropy and extremely tight profile control. The homogenous uniformity of the etching results is an industry leading aspect. Even in complex geometries, the profile control and feature parallelism remain tight and within requirements. Unity is easy to maintain, with quick exchangeable consumables and remote troubleshooting capabilities. The etch model is designed for repeatability and maintainability, so users are able to reproduce the exact same etching conditions over several wafers. Additionally, users are alerted of any problems via the PMAC controller's monitoring equipment. Thanks to the process feedback system, the user can track the etching recipe in real-time. TEL / TOKYO ELECTRON Unity is a powerful and versatile etching unit ideal for industrial and commercial applications. It provides the highest levels of performance, reliability and cost-efficiency for advanced etching and deposition projects. It is designed with the latest in technology, so users can be sure that their etching process is repeatable and that the results are uniform and optimized.