Used TEL / TOKYO ELECTRON Unity #9176469 for sale

TEL / TOKYO ELECTRON Unity is a fully integrated wet etching and ashing equipment. This industry-leading etcher and asher provides users with highly reliable processing with long-lasting stability and low maintenance requirements. TEL Unity system utilizes high-end wet-etching technology for processing a wide range of substrates and material surfaces. The wet-etching process utilizes an ionized etching media, such as pure water, aqueous chemical solutions, or vaporous etchants, to effectively etch and remove unwanted material for surface cleaning, patterning, and/or layer transfer. The ashing process utilizes a dry-etching process to strip away layers of material to create patterns and features. TOKYO ELECTRON Unity unit utilizes a robust range of processing chamber sizes, from small benchtop systems to large production systems, giving users a wide range of capabilities for different processes. The machine is also designed to be compatible with various process gases and chemical delivery systems, allowing for the use of both wet and dry etching. Unity tool is well-equipped with advanced safety features, such as an air-born ultra-filter, a chemical filter, and a chemical exhaust scrubber asset. Additionally, the model is compliant with SEMI safeguarding standards for hazardous operations. TEL / TOKYO ELECTRON Unity equipment features an integrated graphical user interface (GUI) for easy setup and control, including process flow and parameter input, program management, and data display. The system also integrates process recipe management and data archiving for improved traceability. Its built-in display enables users to monitor the progress of each process in real-time and adjust parameters accordingly. TEL Unity unit is also capable of interfacing with a variety of external systems, such as process monitoring and control systems, in order to increase automation and efficiency. TOKYO ELECTRON Unity machine is an ideal solution for users looking to achieve high-performance, reliable, and low-maintenance processing for various wet- and dry-etching operations. With its advanced safety features, robust chamber construction, and user-friendly GUI, Unity tool has become a popular choice for semiconductor, data storage, and advanced materials processing.