Used TEL / TOKYO ELECTRON Unity #9298719 for sale

TEL / TOKYO ELECTRON / NEXX Tornado 300 is an advanced etcher/asher designed for precise, high performance applications in the production of semiconductor wafers. TEL Tornado 300 equipment is a high throughput etching system that combines high speed with high throughput together with maximum quality levels. NEXX Tornado 300 employs a process chamber which is capable of delivering high power densities in a controlled environment for the formation of state-of-the-art features. The process chamber is constructed using all-ceramic materials and the advanced multiple gas delivery unit features the latest in high speed, integrated plenums and high precisions inert gas introduction assemblies. TOKYO ELECTRON Tornado 300's advanced semiconductor process control machine allows rapid performance over a wide range of etching processes. The etch chamber is highly efficient with an impressive cycle time of 15 seconds. This cycle time helps decrease wafer-to-wafer variations and provides superb on-time production through rapid cycle time. This etching tool also features innovative RF power supplies along with process controllers. The RF power supply ensures a steady process flow and also provides superior uniformity as well as controllable power levels. The RF controller offers precise process control parameters that enable high precision cycle time control. The asset also has an advanced programmable process controller that offers precise and flexible programming capabilities such as adjustable temperature, pressure and process parameters. This model can also be easily programmed for high-precision process control parameters. Its simultaneous multi-oscillator mode helps to maintain uniformity over the entire wafer surface. Tornado 300 provides outstanding performance with minimal maintenance, and its advanced gas delivery equipment optimizes gas flow for maximum efficiency and uniformity during etching operations. The advanced gas supply supports a wide range of gases and can be easily adapted for various processes. The system uses both dry and wet etching methods to meet customer needs. TEL / TOKYO ELECTRON / NEXX Tornado 300 is a reliable and powerful etcher/asher solution that helps improve wafer yield, processing time and process performance. This unit is highly configurable for an array of etching and ashing requirements, making it an ideal choice for the semiconductor industry.