Used TEL / TOKYO ELECTRON Vesta #9315096 for sale
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TEL / TOKYO ELECTRON Vesta is a high-performance etching machine (or asher) designed for the semiconductor industry. It uses a combination of plasma etching and bonding technology to create precise and repeatable features on the surfaces of silicon wafers and other substrates. The machine consists of a base, plasma etching chamber, and bonding station, along with additional components for thermal control, cooling, and additional safety. The plasma etching chamber houses the reactive materials, typically a Teflon anode and a heated cathode. Plasma is generated in the chamber, allowing for controlled etching of the substrate. The chamber is connected to a gas control system, which allows for the introduction of reactive gases as needed for the chamber's operation. The bonding station allows for the joining of separate components via wire bonding, providing for higher structural integrity of the finished product. Temperature sensors are located throughout the system, allowing for accurate temperature control of the chamber and workpieces. TEL Vesta is designed to operate in a vacuum environment, providing the most consistent and accurate etching. This allows for better control over etch rates and profiles, as well as a higher degree of edge definition and repeatability. With advanced motion controls, the machine can accurately etch features at up to 6 millionths of an inch in width. The machine is also equipped with safety features, such as a set of gas sensors and pressure relief valves which protect operators and prevent damage due to over-pressurization of the chamber. The machine is completely enclosed in a large metal frame, allowing for the maximum amount of protection during operation. TOKYO ELECTRON Vesta is a state-of-the-art etching and bonding system offering reliable operation and consistent results. With its advanced control and safety features, it is well suited for producing high-quality features on silicon wafers and other substrates in the semiconductor industry.
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