Used TEL / TOKYO ELECTRON Vigus harc #9244886 for sale

TEL / TOKYO ELECTRON Vigus harc is a type of etcher / asher used for extremely precise etching and cleaning of valuable substrates such as semiconductors and other thin film materials. TEL Vigus harc is a wet-based system with an in-line design, ensuring higher throughput speeds, wider processing windows and better uniformity. The machine is designed with a dual-vacuum etch chamber, which allows maximum process flexibility during etch/ cleaning operations with complete isolation of each process chamber. This ensures that vapors from one operation are not carried over to the other, making sure that delicate substrates are not affected by chemicals or vapors generated during processing in the other chamber. TOKYO ELECTRON Vigus harc also has a unique directional-axial-flow design, which guarantees higher yields by focusing on uniformity, allowing processes to be performed with precision. This is achieved by directed flow of the process liquid and etching gas along the central axis of the chamber. The substrate is then positioned in the center of the chamber for maximum uniformity and application of the etching or cleaning processes. The machine is equipped with a variety of advanced features for its operation and safety, such as a reactor gas distribution unit, temperature control, electronically actuated valves, inert gas control with an external scrubber, and a high performance vacuum system. The electrical interlockable doors on the machine help to ensure a safe and secure operating environment. In short, Vigus harc is a sophisticated etcher / asher used for precise etching and cleaning of delicate substrates such as semiconductors. Its novel dual-vacuum etch chamber, directional-axial-flow design and advanced features make it an invaluable tool for high speed, uniform and safe etching and cleaning operations.