Used TEL / TOKYO ELECTRON Vigus L/S #293666857 for sale

TEL Vigus L/S is an etcher/asher that is renowned for its performance and reliability in microfabrication applications. This device uses a combination of wet and dry processes to pattern, etch, expose and/or modify surfaces to various levels of complexity. The strong etch rates achieved with TOKYO ELECTRON Vigus L/S makes it an ideal choice for the regular production of diverse structures from precision device components to nanoscale materials. TEL / TOKYO ELECTRON Vigus L/S is suitable for a wide range of substrates from silicon, silicon dioxide and glass substrates to organic polymers foils, and can also be used on other materials such as metals and ceramic. The device uses a special processing chamber to direct the etching gases, while heated shower head ensures uniformity of all parameters. It also has advanced user control and feedback systems for accurate and repeatable results. The etch rate of the device can reach as high as 10nm/min. which allows for precision control over the etch. TEL Vigus L/S also offers a wide range of process parameters such as gas flow rate, pressure, temperature, exposure time, and has the flexibility to etch shallow features while preserving lateral surface steps. The device is quite reliable with its user-friendly design and advanced safety features. The low voltage main power supply and exhaust features provide added protection. Furthermore, the device has an integrated quality monitoring system that helps to ensure product quality and safety. TOKYO ELECTRON Vigus L/S is extremely flexible and can be adjusted to meet the requirements of any specific application. The device offers high resolution and can be optimized to provide repeatable and reliable results. It is perfect for a wide range of projects that require patterning, etching, or exposure of the surface material. The device can serve as an auxiliary to a lithography system or perform as a stand-alone etcher. In conclusion, TEL / TOKYO ELECTRON Vigus L/S is a reliable and powerful etcher/asher that meets all the requirements of microfabrication applications. Its fast etch rate, advanced process parameters, user safety features, and integrated quality monitoring system make it the ideal choice for a variety of processes.