Used TEL / TOKYO ELECTRON Vigus QN #293666858 for sale

TEL / TOKYO ELECTRON Vigus QN is an etcher equipment designed for advanced semiconductor device processing. It is based on TEL VIGUS method of direct-write lithography, and is equipped with a variety of processes including single-wafer dry-etching, patterning, and coating operations. The system is designed to perform a large range of precision etching operations on a wide variety of substrates, such as silicon, stainless steel, complex materials, and others. The advanced direct-write lithography process utilizes electron beam patterning to create very high precision, repeatable, and highly configurable patterns on the substrate. This provides exceptional accuracy and repeatability, even at very high aspect ratios. TEL Vigus QN is designed with a large 4-track pattern generator to allow for high-speed throughput. This allows for simultaneous etching of different substrates, which increases productivity. It is also designed with a Focused Ion Beam (FIB) source to provide higher etch precision and can be used for a variety of sites post-processing modules such as deposition, etch, and sacrificial layers. TOKYO ELECTRON Vigus QN also includes a range of features to provide improved etch process control. These include a precise pressure control unit, robust vacuum machine, temperature feedback control tool, and closed-process monitoring asset to help ensure a consistent etch result across different substrates. The model also includes a range of hardware and software solutions to facilitate data analysis, review, and decision-making processes. In summary, Vigus QN is an advanced etcher equipment designed to provide precision etching capabilities for a wide range of substrates. It utilizes direct-write lithography, enabling precise, repeatable, and highly configurable patterns. It is equipped with advanced features to achieve high-precision etching, as well as a variety of other tools and functions to ensure efficient and reliable operation.