Used TEL / TOKYO ELECTRON Vigus RK2 #9276793 for sale

ID: 9276793
Wafer Size: 12"
Vintage: 2013
Oxide etcher, 12" 2013 vintage.
TEL / TOKYO ELECTRON Vigus RK2 is an etcher / asher developed and released by TEL, a leading supplier of advanced semiconductor-geared etchers and ashers. TEL Vigus RK2 is capable of precisely etching, developing, or ashing a wide range of materials and substrates, thanks to its highly advanced scanning electron microscope (SEM) technology. At the heart of TOKYO ELECTRON Vigus RK2 is its proprietary domain development software. By selecting from a range of domain manipulation profiles, users can customize the etching process to their specific requirements. Each profile allows the user to select from a range of pressure, temperature, chemical data, and other parameters to ensure optimal results. Vigus RK2 has a range of other features that make it a powerful and efficient tool. Chamber temperature and pressure are both actively managed and monitored in real-time to ensure process consistency. Additional functions such as floor-level trenching and optimized substrate cooling could be added depending on user requirements. The equipment also features advanced wafer monitoring. Wafer skirts - essential for processing larger wafer sizes - are automatic, monochromatic and dynamically adjusted to prevent contamination. TEL / TOKYO ELECTRON Vigus RK2 has a comprehensive modern interface. It is equipped with intuitive graphical user interface (GUI) which keeps users informed in a friendly and clear way. A range of multi-language settings are available to maximize control. As a further quality assurance measure, TOKYO ELECTRON offers remote management services to maintain the highest standards of equipment performance. With a portfolio of services including web-based support, engineering services and process optimization, customers can have the assurance of knowing that their equipment will perform flawlessly at peak efficiency. TEL Vigus RK2 delivers on the quality and performance that customers expect from TEL / TOKYO ELECTRON. The sophisticated SEM technology combined with features like floor-level trenching, user-defined domain manipulation, dynamic wafer management and temperature and pressure control provide unparalleled performance and control. With additional features such as quality assurance measures and a comprehensive user interface, TOKYO ELECTRON Vigus RK2 is the preferred solution for customers who need to etch, develop, or ashing a wide range of materials and substrates.
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