Used TEL / TOKYO ELECTRON Vigus #293592518 for sale

TEL / TOKYO ELECTRON Vigus is an etcher/asher that is used for the patterning of silicon wafer substrates. It is capable of high-speed patterning with very precise control over etch depth and angle. Through its innovative design, TEL Vigus enables the etching of fine structures and deep trenches for the development of semiconductor devices. TOKYO ELECTRON Vigus is a vertical electrochemical (EC) etching equipment utilizing both deep etching and planar etching and comes equipped with a unique multi-stage Dry Etching (DE) capability. It has been designed to help semiconductor manufacturers create high resolution structures and various etch geometries. It is capable of patterning curved and non-standard shapes into silicon substrates. Vigus is designed to be an operator-friendly system that is simple to install and operate. It uses an inkjet-induced process with a built-in controller which enables the user to adjust parameters such as exposure, dwell time, rinse, and clear. The user is able to adjust various properties such as pole-to-pole, exposure, and background. Additionally, the unit features a real-time recipe visualizer that provides the user with feedback during the etching process. TEL / TOKYO ELECTRON Vigus operates with a vertical, multi-stage electrochemical etching machine that is powered by a high performance AC in order to provide a highly automated and precise etching process. With its advanced control functions, TEL Vigus can process a wide range of materials such as oxide, silicon oxide, and glass. With its quick and precise etching process, the tool can easily process low and high aspect ratio structures with a great level of accuracy. TOKYO ELECTRON Vigus is a reliable and efficient etching asset that is ideal for semiconductor wafer manufacturers looking for a precise and cost effective solution for their processing needs. With its all-in-one, easy-to-operate design, the model is capable of enabling the user to produce intricate patterns with high precision and repeatability. Additionally, the equipment is one of the few etching systems available in the market today with a direct-to-chip, multi-stage process that is both reliable and efficient.