Used TEL / TOKYO ELECTRON Vigus #293826900 for sale

TEL / TOKYO ELECTRON Vigus is an etcher / asher used for precision plasma etching and resist ashing. This machine is designed to provide superior accuracy and is ideal for high precision etching needs. It is capable of etching with a very fine resolution due to its focused beam. TEL Vigus has a laser-based etching equipment which can be calibrated for a wide range of etch rates. It is capable of etching with a range of gases, such as oxygen, argon, and nitrogen, and can create a variety of patterns according to user needs. It is also able to change etch profiles to optimize pattern performances. The machine is equipped with an advanced control system with the ability to analyze signals from multiple beam sources and optimize integrated etching processes. This unit enables reduced levels of pattern accuracy errors as well as increased repeatability of etch results. The machine also has a dielectric gate function which prevents pattern etch from occurring near sensitive features. TOKYO ELECTRON Vigus features a resist ashing machine that can produce high-resolution resist removal results and is suitable for high-precision etch requirements. This etcher can provide a uniform resist removal thickness and speed. It also offers a low contaminant ashing tool that does not require a high voltage plug and it provides reliable and efficient etching results with a minimum number of particles. Vigus is a compact and lightweight etcher that is user-friendly with easy to use operation. It also features a long-lasting and unobtrusive design that can easily be kept in a laboratory as it does not produce smoke or odor. Furthermore, it has a high-powered beam that offers an unmatched etching speed. Overall, TEL / TOKYO ELECTRON Vigus is an advanced-quality etcher / asher that provides a reliable and efficient etching quality desired for precision etching and resist ashing needs. It offers a wide range of features that make it ideal for demanding etching applications and its robust control asset guarantees high-level of accuracy. This machine is suitable for various disciplines of etching and ashing processes and provides excellent etching results without generating smoke or odor.