Used TEL / TOKYO ELECTRON Vigus #293829838 for sale

TEL / TOKYO ELECTRON Vigus, produced by Japan's leading manufacturer for etching and ashing machines, is a high-performance etcher/asher equipment designed for semiconductor device fabrication processes. This system consists of two modules: a vacuum manifold and a heater/guidance unit. The vacuum manifold includes a vacuum chamber, which contains an array of process gas nozzles, and a vacuum unit, which provides the precise control of pressure and background gas in the chamber. The heater/guidance unit consists of a high-performance heater and a wafer stage to precisely guide and control the wafer during etching and ashing. These two modules produce a reliable and repeatable etching/ashing environment that ensures high yields. TEL Vigus provides a high etching rate and uniform cleaning results, enabling advanced semiconductor processing. Its design is capable of depositing high-quality oxide and nitride films, accessing tight crevices in small-pitch circuitry, and delivering high-quality ashing. This flexible machine accommodates substrates of various sizes, from 200mm wafers to ultra-small chips. TOKYO ELECTRON Vigus also provides real-time monitoring of wafer surface temperature and etching/ashing rates. It also includes a control and analysis tool to monitor process parameters, and enhanced process control for automated operation. This ensures accurate process results. Vigus offers an anode and cathode chamber design capable of supporting advanced ion-beam etching and high-density plasma ashing. It provides excellent uniformity over different substrate sizes, allowing tight process control. It also supports a range of diverse fabrication processes, including dry film resist stripping, over etching, and metal line etching. In addition, its safety features ensure consistency and reliability in operations, helping protect process control. TEL / TOKYO ELECTRON Vigus is used in a wide range of industries, including semiconductor, nanotechnology, and biotechnology. This etcher-asher asset produces excellent etching and ashing results, providing users with higher yields and process efficiency. Its reliability and safety features make it an ideal choice for a wide variety of applications.