Used TEL / TOKYO ELECTRON Vigus #9276792 for sale

TEL / TOKYO ELECTRON Vigus is an etcher/asher developed by premier electronics company, TEL. This machine is designed to achieve ultra-high levels of efficiency in surface microstructure and fabrication processes of a variety of substrates. TEL Vigus is capable of performing etching, ashing, and other related surface processes with a range of substrates including silicon, gallium arsenide, and gallium nitride. The machine is equipped with a depth control deposition sputtering equipment and a large dynamic range for etching control. It provides excellent precision and uniformity, as well as an ideal interface for handling different types of substrates. Additionally, TOKYO ELECTRON Vigus also features a multi-beam mask alignment system for precise alignment, high resolution and speed of electron beam lithography, in conjunction with a robust wafer handling unit. This ensures optimized surface processing at high throughputs while maintaining precise shape and size control. The machine is easy to maintain and operate due to its modular design, which makes it possible to upgrade and repair individual parts. Additionally, it comes with an onboard diagnostic machine, which is integrated with an automatic fault detector, enabling easy maintenance and quick reaction time to potential problems. Finally, Vigus is backed up by exceptional after-sales service as well as training and consultation to ensure the full range of benefits from this advanced machine. It delivers ultra-high performance and accuracy with a minimum risk of defect formation, allowing users to accelerate the process of product development.