Used TES / TECHNOLOGY ENGINE OF SCIENCE CUMAX-FT #293595225 for sale
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ID: 293595225
Vintage: 2012
Dry etcher
(4) Load ports
BROOKS AUTOMATION Robot
2012 vintage.
TES / TECHNOLOGY ENGINE OF SCIENCE CUMAX-FT etcher / asher is a precision wafer processing equipment used in the semiconductor industry. It provides accurate and repeatable etch and process control that is specifically designed to meet the demands of advanced production applications. TES CUMAX-FT provides superior etching and process control with reliable repeatability. It is capable of delivering high-quality etching results, with improved throughput and lower-cost-of-ownership. TECHNOLOGY ENGINE OF SCIENCE CUMAX-FT can process wafers up to 4" in size and has an adjustable etch gap of 0-20 μm for superior process control. Its improved design includes multiple etch angles to provide consistent etching results and reduce defects. It also has the ability to handle a variety of etch processes, including dry etch, silicon etch and dielectric etch processes. The etching chamber of CUMAX-FT is built with a low volume and high vacuum confinement ensuring a homogenous uniform etching rate. Its automated chamber-cleaning capability reduces required maintenance cycles, improving process repeatability and overall efficiency. It is also fitted with multiple pressure and temperature sensors for precise control over process parameters. TES / TECHNOLOGY ENGINE OF SCIENCE CUMAX-FT is also equipped with a user-friendly control system, enabling easy setup and operation. It has advanced process control algorithms for improved production results and is versed for process recipe implementation for rapid transition into production. Additionally, the system has communication interface ports for remote PC control and off-line data logging capabilities. TES CUMAX-FT is a reliable etch engine that is ideal for high-precision applications. Its advanced features and reliable repeatability make it an excellent choice for production environments. Furthermore, its ease-of-use make it suitable for integration in any R&D or production setup.
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