Used TOKYO OKA / TOK OPM 1200 #9269154 for sale

TOKYO OKA / TOK OPM 1200 is an etcher/asher for use in developing photomasks. It is an acid-free, high-pressure equipment that can provide extra speed and precision for a variety of etching and ashing applications. TOK OPM 1200 utilizes a multi-processor control system which enables multi-axis etching in-between layers. The unit is designed to save time and improve product yields by reducing the number of steps in etching, reducing downtime between processes, and reduce handling of the substrate. TOKYO OKA OPM 1200 has a large single-use load capacity, making it well suited for high-volume production and mass production lines. The machine can be employed to etch substrates such as polyimide, glass, silicon, etc., up to 12 inch (300 mm) in size and can etch various thicknesses of target material at rates ranging from 0.4 to 3.0 inches per minute (1.0μm to 8.0μm per minute). The tool features a sophisticated digital processor and PLC control asset, and an 8-axis pantograph X-Y-Z-θ-θ rotary-axis motion model, allowing for precise and repeatable etching patterns. OPM 1200 features a patented control equipment that uses four timer circuits and a servomotor to precisely control etching rates, angles, depths, and overlap between the layers. This ensures uniformity and accuracy while minimizing incorrect etch depths and layer transitions. The system can also be configured with an optional optical inspection unit for added reliability. The adjustable pressure allowing for high-speed but low pressure (maximum 17.5 kgf/cm2) etches, and the high energy efficiency design minimizes the use of chemicals and overall environmental impact. The machine also features a safety enclosure which prevents the formation of corrosive and hazardous atmospheres, and the sealed microclean filters are easy to maintain. The AC-free design greatly reduces the risk of electrocution, and built-in safety measures such as an emergency stop button protect operators from injury. As a result, TOKYO OKA / TOK OPM 1200 provides a safe and efficient etching and ashing solution for a variety of materials and product applications.