Used TOKYO OKA / TOK OPM2001CN #9055154 for sale

TOKYO OKA / TOK OPM2001CN is an etcher / asher that is designed for a variety of application in the microelectronics industry. It is a semi-automatic equipment, consisting of a vacuum processing chamber and a control system. The vacuum processing chamber contains four heating zones and two cooling zones, and contains an etching and ashing chamber for processing wafers and substrates up to 8 inches in diameter. The control unit comprises a programmable logic controller (PLC) and an operator interface panel. This etcher uses nitrogen, argon and oxygen gas depending on the material being processed. The temperature of the etching and ashing chamber can be adjusted between 20 and 300 degrees Celsius, with the etching gas ranging from 100 to 500 sccm. The temperature and pressure of the chamber can be monitored through various sensors in the machine, ensuring optimum processing conditions. Wafers and substrates are loaded into the loading station of the tool before the vacuum processing chamber door is closed. The door is sealed by a vacuum pump before etching begins. The chambers internal temperature within the etching and ashing chamber is monitored and controlled by the PLC, allowing for optimized etch rate and product quality. When the etch process is complete the vacuum pumps are turned off, allowing the wafers and substrates to be unloaded safely from the asset. The vacuum pumps must be turned off to ensure that the chamber is pressurized and that no toxic substances are released into the working environment. The exhaust levels are monitored by the built-in sensors and systems. If the exhaust levels exceed a pre-specified limit, the model will alert the operator. TOK OPM2001CN is designed to be a reliable and efficient tool for companies who require high quality etching and ashing results on a variety of materials. The equipment is equipped with a number of safety features, ensuring that the system is safe to operate and that toxic substances are not released into the working environment. The user-friendly operator interface allows for fast and accurate adjustments to be made to the etching and ashing process, allowing for quick and efficient processing.