Used TOKYO OKA / TOK TCA 3400 #9181768 for sale

TOKYO OKA / TOK TCA 3400 is an etcher / asher equipment that provides high quality etching, ashing and cleaning process for a variety of applications. It yields superior performance and reliability through the use of high speed and precision equipment, as well as advanced process control. This etcher / asher system is designed to improve performance, reduce costs and increase process yields. The etcher / asher features a highly advanced precision spray process that employs either a direct spray or a fan type gas containment shroud-like design. This unit is designed to provide an even, high-quality etching of both metal and nonmetal materials. The process can be easily adjusted to facilitate the etching of various shapes, materials and sizes. The fan type gas containment feature also helps reduce the amount of gas used and energy consumption, as well as eliminating waste. Additionally, TOK TCA 3400 provides an advanced self-calibration feature for optimized efficiency. This feature automatically maintains the process parameters, ensuring consistent and quality etching and cleaning results. The process parameters can also be managed via a TOKYO OKA TCA-3400 user interface. The machine includes an automatic cleaning process, which ensures a consistently clean chamber and equipment. It utilizes a rotating, power-assisted brush and a filtered vacuum tool to minimize debris. This asset can be set up to perform cleaning process runs in either manual or automatic modes. The chamber is also equipped with an automatic wafer loading model that ensures efficient and automated loading of wafers. TOKYO OKA / TOK TCA-3400 also features a wide range of options that allow users to customize their etching and cleaning processes. Various chamber modifications, such as chambers with integrated ion etch and sputter etch, can be easily done. Additionally, the equipment can accommodate various process parameters, such as gas mixing, wafer shape, wafer size, gas type, and substrate type. Overall, TOKYO OKA TCA 3400 is an advanced etcher/ asher system that provides superior etching and cleaning performance. It is easy to use, highly configurable and provides consistent results. With its advanced features and wide range of options, TOK TCA-3400 is a perfect choice for any etching and cleaning requirements.