Used TOKYO OKA / TOK TCA 7822S #9239620 for sale

TOKYO OKA / TOK TCA 7822S is an etcher / asher developed by Tokyo Okamoto Co., Ltd. The 7822S is a low-temperature, high-precision, single-sided etcher/asher used in the production of semiconductor devices. This etcher/asher is used for cleaning, stripping, and etching surfaces of wafers and masks. TOK TCA 7822S is a rotary temperature controlled, four-chamber etcher/asher. It operates with a wide range of materials including oxide films, polymers, silicon nitride films, glass, and metals. The etcher/asher utilizes technology that enables precise temperature control up to 400˚C, and supports the use of low pressures up to 1 bar. The front side of the 7822S has a wafer cassette loading equipment and a programmable shuttle system for cassette wafer loading and unloading. The etcher/asher is designed with four independent gas flow chambers. They are: the Upper Heated Chamber (UHC), the Lower Heated Chamber (LHC), the AnnULAR Heated Chamber (AHC), and the Unheated Chamber (UHC). The 7822S employs an advanced heating technology to automatically adjust the temperature for each respective chamber. The temperature settings used in the respective chambers can be adjusted by inputting specific degrees for each chamber. TOKYO OKA TCA 7822S also includes a touch panel front panel for easy operation with a graphical user interface. The 7822S can be programmed with a variety of formulas for etch rates, etch depths and etch speeds, making it perfect for satisfying the etching needs of all industries. The etcher/asher is designed with a 64 bit high speed processor and multiple interfaces, which enable quick and accurate data exchange. The 7822S also includes a vacuum rotary sputter unit (VRS) to deposit highly conducting films such as aluminum oxide or other insulating materials. The 7822S is capable of etching a wide variety of materials including metals, polymers, and silicon nitride. TCA 7822S is the perfect etcher/asher for the production of semiconductor devices. This etcher/asher meets a wide variety of etching needs for a variety of industries with its precise temperature controls, programmable shuttle machine, integrated touch panel and variety of formulas. This advanced etch/ashers technology provides consistent and reliable results with each etch output.