Used TOKYO OKA / TOK TCE-7822 #293625343 for sale

TOKYO OKA / TOK TCE-7822 is a high-performance etcher/asher designed for excellent performance and reliability in a range of application environments. This unit is well-suited for etching and ashing processes of medium to high volume production, including in laboratory and industrial settings. The equipment includes a powerful etcher/asher column with an adjustable height for optimal process control. This column is mounted on a solid bed support, which also provides rotary indexing for monitoring etch times. The column is controlled by a stepper motor, allowing for precise and accurate adjustments in etch time, temperature and pressure. The system also includes a high-capacity vacuum tank for efficient recovery of etching and ashing residue. TOK TCE-7822 is designed to allow for a number of advanced etching and ashing processes. The unit is capable of processing multiple substrates, and can be adapted to a variety of etching shapes, including trenches, via etch, contact holes, aspect ratio (AR) etch, and window etch. The etch window can range in size from 0.1um up to 200 µm. To optimize etching accuracy, the machine can be adjusted to incorporate variable anisotropic etching times and variable depths of etch (DOE). TOKYO OKA TCE-7822 is compatible with a number of gases and reagents, allowing for use in a variety of processes. Etching gases include oxygen, nitrogen, and argon. When used in conjunction with one of these gases, the tool can be used for either wet or dry etching. Reagents can be used for both selective etching and planarization processes. Lastly, the asset can also be used for rapid thermal annealing. TCE-7822 also includes advanced process control features for reliability and accuracy in demanding environments. The model includes a multi-gas substitution control, allowing for precise flow control and multiple gas input. The equipment also incorporates a vacuum control feature that helps to optimize process pressure and uniformity. This feature also helps to ensure fast etch rates, minimal redeposition and decreases in etch residue. In summary, TOKYO OKA / TOK TCE-7822 is a reliable and powerful etcher/asher capable of a range of etching and ashing processes. This system can process a variety of substrates, process etch windows with a range of sizes, and accommodate multiple gases and reagents. The unit has advanced process control features, such as multi-gas substitution control and vacuum control, for enhanced etching accuracy and reliability.