Used TRIKON / AVIZA Celsior #182678 for sale

TRIKON / AVIZA Celsior is an etcher and asher that uses chemical-based etching and ashing processes to create nanoscale devices. AVIZA Celsior is a fully automated instrument that allows for the selection of a wide range of etch chemistries and process parameters. TRIKON Celsior features a fully computerized equipment that controls parameters such as temperature, pressure, temperature gradient, and composition of etch solutions. Additionally, Celsior offers precision controls for etch rate, throughput, and etch quality. TRIKON / AVIZA Celsior employs a chemical vapor etching (CVE) process that enables high etch rates with very exact control of etch rate and topography. This process, coupled with AVIZA Celsior's high-resolution etch pattern capability, allow for nanoscale processes. TRIKON Celsior also offers a unique vacuum-assisted deposition process, allowing a number of deposition options. Celsior is able to etch and asher a variety of materials, including metals, alloys, oxides, and ceramics, as well as fabricated samples such as wafers and dies. The wafer size in the system is 125mm with a minimum feature size of 10nm. TRIKON / AVIZA Celsior also offers three etch modes: selective etch, full etch and/or blanket etch. AVIZA Celsior also features a fully integrated laboratory support unit to help ensure the highest quality etching and ashing processes. This machine supports sample loading and unloading, automated process control, recipe creation and management, patterned layer etching, post-processing, and report generation. The tool also provides recipe creation and management, sample run scheduling, and automated data logging with built-in graphical displays and reporting. The asset provides an optional automated optical inspection model to support automated pixel evaluation of etched and ashed samples. TRIKON Celsior is an ideal solution for researchers and developers of high performance nanoscale materials and processes. Combining high etch rate, precision control, and automated processing, Celsior can be used to produce a variety of structures, patterns, and components with the highest quality. TRIKON / AVIZA Celsior is an ideal choice for those seeking high-precision etching and ashing solutions.