Used TRIKON / AVIZA Celsior #293652303 for sale

ID: 293652303
Wafer Size: 12"
Atomic Layer Deposition (ALD) system, 12".
TRIKON / AVIZA Celsior is a professional etcher/asher equipment designed for high-end applications. This powerful etcher/asher utilizes advanced technologies to deliver an exceptionally clean, consistent surface finish with excellent repeatability. With its multi-zone temperature control and pre-conditioning heat-up functions, users can achieve a fast, reliable etch process for metals, ceramic, and dielectric substrate materials. AVIZA Celsior utilizes a three-stage process of pre-conditioning, electrical conditioning and etching to produce a fine, uniform surface finish. The pre-conditioning stage heats the material up to a pre-defined temperature in order to remove any surface residue and allow for a more efficient electrical and etching process. The electrical conditioning phase utilizes high voltage, high frequency electrical pulses to break down and roughen the surface of the material which results in a better etch. The etching phase of the process involves exposing the material to a reactive gaseous etchant consisting of an oxidizer, a halogen-containing reactant, or a combination of the two. This reactive gaseous etchant solution is then exposed to a high power microwave field to cause a chemical reaction at the surface of the material which results in the etching of the material. TRIKON Celsior features a highly accurate, user-friendly LCD display for setting etching parameters and monitoring etchant activity. The intuitive graphical user interface provides clear and concise instructions for setting up etching jobs, as well as up-to-date information on the current etching parameters and etchant status. The wide range of powerful features allows users to customize the etching parameters to their specific applications. In addition, Celsior is designed with the environment in mind. It is equipped with a filtration system to ensure that all etchant gases are safely removed, and it has safety interlocks to prevent unnecessary gas emission. The unit also features a low-noise operation, making it ideal for laboratory, research, or industrial applications where noise pollution is a concern. In summary, TRIKON / AVIZA Celsior etcher/asher machine provides an exceptional level of performance in etching and ashing applications. Its high-end features, advanced technologies, and powerful capabilities make it an ideal choice for any etching or ashing job.
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